Quartz crystal microbalances—or QCMs as they are commonly called—are electronic devices used within vacuum deposition chambers to measure thin film thickness on substrates.
6 MHz Quartz crystal sensor. Also called a double-anchor pattern, these crystals are for use in thin film deposition monitors and controllers, including Inficon, Maxtek, Sigma Instruments, and Sycon instruments. AT-CUT, 14 mm diameter.
MVT6IDA-Au Cr/Au Gold
MVT6IDA-Ag Cr/Ag Silver
MVT6IDA-Al Ag/Al Aluminum
(Wafer size diagram）：Double Anchor pattern
(Angle of cut)：： AT / 35°15’±1′
(Shape of the wafer)： (plano-convex)
(Radius of curvature of Convex ) 210mm
(Roughness of the surface)： 1.6～0.8μm
(Wafer size diagram）：
(Electrical parameters)：
(Nominal frequency/mode）： 6MHz
(Side A electrode material）： CrAu, AgAl, CrAg
(Side B electrode material）： CrAu, AgAl, CrAg
(Central frequency）： 5.983MHz
(Fr. tolerance）： ±7kHz, at 25℃
(Resistance）： <15Ω
(Static capacitance C0）： <20pF
(Equivalent capacitance C1）： —
(Quality factor Q）： ＞185k
(Working temperature)： 70℃±10℃
(Storage temperature)： -40℃～105℃
