5 MHz ​​Quartz crystal sensor for use in Ulvac and Sloan instruments. Fully coated, both sides.  AT cut, 12.5 mm diameter.

     MVT5SL-Au  Cr/Au  Gold

     MVT5SL-Ag  Cr/Ag  Silver

     MVT5SL-Al   Ag/Al   Aluminum

 

(Wafer size diagram):Solid pattern

(Angle of cut):: AT / 35°08′15″±1′

(Shape of the wafer): (plano-convex)

(Radius of curvature of Convex ): 106mm

(Roughness of the surface): 1.6~0.8μm

(Wafer size diagram):

 

(Electrical parameters)

(Nominal frequency/mode): 5MHz

(Side A electrode material): CrAu, AgAl, CrAg

(Side B electrode material):CrAu, AgAl, CrAg

(Central frequency): 5.000MHz

(Fr. tolerance): ±5kHz, at 25℃

(Resistance): <30Ω

(Static capacitance C0): <20pF

(Equivalent capacitance C1): —

(Quality factor Q): >185k

(Working temperature): 70℃±10℃

(Storage temperature): -40℃~105℃